Major electron optics innovation

With its announcement of the MagellanT Family, FEI introduced a new class of instruments called extreme high-resolution scanning electron microscopes (XHR SEMs). The Magellan XHR SEM allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer (about the size of ten hydrogen atoms, side-by-side). Most importantly, the Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below.

"The Magellan XHR SEM is the most significant electron optics innovation since FEI introduced the TitanT Family three years ago," said Dr. Rob Fastenau, FEI's Executive Vice President, Marketing and Technology. "Magellan is in a class by itself, just as Titan is for transmission electron microscopes, and our innovative Helios NanoLabT family is for DualBeamT systems. Magellan is the only family of instruments to make sub-nanometer resolution accessible in a practical sense to non-experts and without restriction on samples-constraints that have previously limited the utility and acceptance of other systems."

Sub-nanometer resolution has critical value in scientific research and industrial R&D.

The Magellan Family's performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage and high stability platform with fully configurable analytical chamber. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation and unequaled stability.

The Magellan 400 is optimised for scientific research and has an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs. www.fei.com